Market segment

(ultra-high) vacuum.

Many high-tech systems use (ultra-high) vacuum to enable sensitive processes to run optimally, for example without disturbance due to contamination. However, a vacuum entails special challenges, such as outgassing, bearings, sealing, cooling and clean working. Building onto our semiconductor experience, we develop (ultra-high) vacuum solutions for all kinds of applications.


fewer disturbances, increased yield.

Systems for lithography (EUV), electron microscopy (SEM, TEM), advanced cooling and other high-tech applications often work with (ultra-high) vacuum. This is because when there is only a partial vacuum or no vacuum, particle/light beams lose their intensity or there is an undesirable heat load. We apply our broad expertise for developing systems with (ultra-high) vacuum. For example, we design effective seals and feed-throughs. We also have knowledge of outgassing and the correct application of vacuum-compatible materials. We have cleanroom facilities that enable us to do clean work.


short-stroke wafer stage

vacuum transfer line

Pulsed Laser Deposition


"we invest all of our energy in creating vacuum."

We have broad experience with (ultra-high) vacuum. Our specialisms are cooling (when there is no heat conductivity or heat flow) and lubrication (when air bearings are not permitted). We develop solutions designed to extract heat from the system and are knowledgeable about suitable lubricants. If necessary, we provide for a separation between the ‘contaminated’ and ‘clean’ vacuum.

high-tech systems & materials

more market segments

additive manufacturing

Additive manufacturing (3D printing) offers manufacturers unprecedented design freedom…

Read More


The scientific community is developing advanced methods for analyzing the composition…

Read More


Delicate materials and products, such as chips, wafers, optical fibers, films, foils…

Read More


Inspection plays an increasingly larger role in monitoring the quality of production…

Read More


Research and industry are imposing increasingly higher demands on quality control…

Read More


High-tech systems must deliver complex functionality and therefore must meet strict…

Read More


Moore’s law continues to dictate the pace of the semiconductor industry. We…

Read More

thin-film technology

Researchers are achieving spectacular results in the laboratory with thin-film…

Read More

thermal management

Thermal effects determine the quality and accuracy of numerous high-tech systems and..

Read More